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Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy

Authors :
Raineri, V.
Calcagno, L.
Giannazzo, F.
Goghero, D.
Musumeci, F.
Roccaforte, F.
Francesco La Via
Source :
Scopus-Elsevier

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier
Accession number :
edsair.dedup.wf.001..10ff15c8df55d7ff6d76f95ede0ca3ec

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