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Experimental residual stress mapping in bonded semiconductor devices

Authors :
Reiniger, D.
Gavin Horn
Mackin, T. J.
Lesniak, J. R.
Zhong, Y.
Chu, Y. S.
Leseman, Z. C.
Source :
Scopus-Elsevier

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier
Accession number :
edsair.dedup.wf.001..081cd48fe05ac3cb286db56e8ba1fb7c

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