Small angle X-ray scattering study of TiO2 thin films at grazing angles

Nanocrystalline TiO2 thin films, deposited on the flat glass substrate using various techniques, have been investigated by GISAXS. In data interpretation it is assumed that the surface roughness correspond to the bulk structure of the film, which is porous. Therefore, both contributions should indicate the same average particle sizes and film porosity. So obtained film parameters are correlated to photo cell efficiency.