Mapping of local argon impingement on a virtual surface: an insight for gas injection during FEBID

Subjects

Subjects :

Materials Science(all)
Chemistry(all)

Details

Language :

English

ISSN :

09478396

Volume :

117

Issue :

4

Database :

OpenAIRE

Journal :

Applied Physics A

Accession number :

edsair.core.ac.uk....24ef6c9a54775d2aeb126151d9d47c8d

Full Text :

https://doi.org/10.1007/s00339-014-8755-y