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Modeling of Matched Microstrip Lines on Bulk and Micromachined Structures
- Source :
- 2003 International Semiconductor Conference, IEEE CAS 2003, pp. 121–124, Sinaia, Romania, September 28-October 2, 2003, info:cnr-pdr/source/autori:Cismaru A, Marcelli R, Sajin G, Craciunoiu F/congresso_nome:2003 International Semiconductor Conference, IEEE CAS 2003/congresso_luogo:Sinaia, Romania/congresso_data:September 28-October 2, 2003/anno:2003/pagina_da:121/pagina_a:124/intervallo_pagine:121–124
- Publication Year :
- 2003
- Publisher :
- CAS Office, Bucuresti, ROU, 2003.
-
Abstract
- In this paper, two matched microstrip line configurations for the excitation of magnetostatic wave resonators (SER) have been studied for optimizing the SER performances. The first transducer was designed on a bulk silicon substrate, and the second one suspended on a micromachined membrane, to be realized by means of wet anisotropic etching. These configurations were simulated by Microwave Office.
- Subjects :
- Micromachining
Microstrips
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- 2003 International Semiconductor Conference, IEEE CAS 2003, pp. 121–124, Sinaia, Romania, September 28-October 2, 2003, info:cnr-pdr/source/autori:Cismaru A, Marcelli R, Sajin G, Craciunoiu F/congresso_nome:2003 International Semiconductor Conference, IEEE CAS 2003/congresso_luogo:Sinaia, Romania/congresso_data:September 28-October 2, 2003/anno:2003/pagina_da:121/pagina_a:124/intervallo_pagine:121–124
- Accession number :
- edsair.cnr...........d0abb6e7e899b382d465ed50e61e3ea3