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Microwave annealing of Al+ implanted 4H-SiC: towards device fabrication
- Source :
- 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), pp. 653–656, Miyazaki, Japan, September 29-October 4, 2013, info:cnr-pdr/source/autori:Nath, A.; Parisini, A.; Tian, Y-L; Rao, M. V.; Nipoti, R./congresso_nome:15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013)/congresso_luogo:Miyazaki, Japan/congresso_data:September 29-October 4, 2013/anno:2014/pagina_da:653/pagina_a:656/intervallo_pagine:653–656
- Publication Year :
- 2014
- Publisher :
- Trans Tech Publications, Uetikon-Zürich , Svizzera, 2014.
-
Abstract
- Carrier transport in Al+ implanted 4H-SiC for Al concentrations in the 5 x 10(19) - 5 x 10(20) cm(-3) range and after 2000 degrees C/30s microwave annealing is characterized. Each sample resistivity decreases with increasing temperature and attains values of about 10(-2) Omega cm for temperatures >= 600 K. At room temperature, resistivity decreases from 4 x 10(-1) Omega cm to 3 x 10(-2) Omega cm with the increase of implanted Al concentration. The onset of an impurity band conduction around room temperature takes place for implanted Al concentrations >= 3 x 10(20) cm(-3). Al+ implanted and microwave annealed 4H-SiC vertical p(+)-i-n diodes have shown promising forward characteristics.
- Subjects :
- doping by ion implantation
p-i-n diode
4H-SiC(Al)
microwave annealing
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), pp. 653–656, Miyazaki, Japan, September 29-October 4, 2013, info:cnr-pdr/source/autori:Nath, A.; Parisini, A.; Tian, Y-L; Rao, M. V.; Nipoti, R./congresso_nome:15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013)/congresso_luogo:Miyazaki, Japan/congresso_data:September 29-October 4, 2013/anno:2014/pagina_da:653/pagina_a:656/intervallo_pagine:653–656
- Accession number :
- edsair.cnr...........cfb485d9452380679ea7fc8e1138927d