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Growth rate effect on 3C-SiC film residual stress on (100) Si substrates

Authors :
Anzalone R
Locke C
Carballo J
Piluso N
Severino A
D'Arrigo G
Volinsky AA
La Via F
Saddow SE
Source :
(2010)., info:cnr-pdr/source/autori:Anzalone R, Locke C, Carballo J, Piluso N, Severino A, D'Arrigo G, Volinsky AA, La Via F, Saddow SE/titolo:Growth rate effect on 3C-SiC film residual stress on (100) Si substrates/doi:/rivista:/anno:2010/pagina_da:/pagina_a:/intervallo_pagine:/volume
Publication Year :
2010

Details

Database :
OpenAIRE
Journal :
(2010)., info:cnr-pdr/source/autori:Anzalone R, Locke C, Carballo J, Piluso N, Severino A, D'Arrigo G, Volinsky AA, La Via F, Saddow SE/titolo:Growth rate effect on 3C-SiC film residual stress on (100) Si substrates/doi:/rivista:/anno:2010/pagina_da:/pagina_a:/intervallo_pagine:/volume
Accession number :
edsair.cnr...........af8933d5a5093f80de2ef3c841e19f8e

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