Requirements and possibilities of micro and nano metrology

The demands for micro- and nanometrology result primarily from the development of micro and nano technologies for the industrial areas of precision engineering, micro and nano electronics and optoelectronics, molecular technology, etc. In this work, the possibilities of micro and nano metrology of lengths in the field of precision engineering will be presented, reflected in the development of precise and ultra-precise treatments as consequence of increased requirements for miniaturization of products and the complexity of forms, and by narrowing the limits of allowed deviations with the increased requirements on the surface quality. The response from the aspect of metrology is the development of new methods and instruments whose capabilities, advantages and limitations are presented in this paper with special focus on the problem of insuring traceability and calibration. Since the Laboratory for precise measurement of length at the Faculty of Mechanical Engineering and Naval Architecture has been carrying out for a number of years intensive research in the area of micro and nano metrology in the development of measuring methods and ensuring traceability and calibration, the paper will present the results obtained at the Laboratory.