Characterization of a broad ion beam source by non-conventional methods

For optimization and adjustment of ion beam sources in surface application, knowledge of physical beam parameters and plasma processes in the ion source has to be provided by suitable diagnostics. For this purpose, novel diagnostic methods which complete the common diagnostics are suggested. The so-called "non-conventional" methods are: visualization of the ion beam by interaction with a cloud of micro-disperse particles and characterization of the sheath region in the plasma source by sheath photometry.