Capacitive mems power sensor

Authors :: Vähä-Heikkilä, Tauno
Kyynäräinen, Jukka
Oja, Aarne
Varis, Jussi
Seppä, Heikki
Source :: Vähä-Heikkilä, T, Kyynäräinen, J, Oja, A, Varis, J & Seppä, H 2002, Capacitive mems power sensor . in Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002 : Heraklion, Greece, 26-28 June 2002 . Foundation for Research and Technology Hellas .
Publication Year :: 2002
Publisher :: Foundation for Research and Technology Hellas, 2002.
Abstract: A novel inline type millimeter wave MEMS power sensor is presented. The electrostatic force due to the rms voltage across the transmission line conductors displace the sensor electrode, and the movement can be detected capacitively. The modelling of the sensor shows that it has S11 better than -30 dB up to 32 GHz with a power resolution of -28 dBm.

Language :: English
Database :: OpenAIRE
Journal :: Vähä-Heikkilä, T, Kyynäräinen, J, Oja, A, Varis, J & Seppä, H 2002, Capacitive mems power sensor . in Proceedings of the 3rd Workshop on MEMS for Millimeterwave Communications, MEMSWAVE 2002 : Heraklion, Greece, 26-28 June 2002 . Foundation for Research and Technology Hellas .
Accession number :: edsair.355e65625b88..9c366e2baa093a9b77ef36a670bbc0aa