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Characteristics of α-SiC: H films produced by the r.f. plasma pulsed deposition method — Effect of deposition temperature

Authors :
Yamada, H.
Tsuji, O.
Source :
Carbon; 1998, Vol. 36 Issue: 12 p1874-1874, 1p
Publication Year :
1998

Details

Language :
English
ISSN :
00086223
Volume :
36
Issue :
12
Database :
Supplemental Index
Journal :
Carbon
Publication Type :
Periodical
Accession number :
ejs8721624
Full Text :
https://doi.org/10.1016/S0008-6223(98)90066-5