Monitoring of Graphene Properties in the Process of Viral Biosensor Manufacturing

The properties of graphene chips with low reproducibility (LR) after photolithography (PLG) and graphene functionalization have been studied. It is shown that the introduction of additional cleaning after PLG can significantly increase the reproducibility of the parameters of processed graphene in biosensors. The use of dilute PBS solutions for virus detection makes it possible to increase the relative concentration sensitivity of biosensors by several times.