A 10-Channel, 120 nW/Channel, Reconfigurable Capacitance-to-Digital Converter for Sub-<inline-formula><tex-math notation="LaTeX">$\mu$</tex-math></inline-formula>W Robust Wearable Sensing

This paper presents a 10-channel, 120 nW/channel, reconfigurable capacitance-to-digital converter (CDC) enabling sub-<inline-formula><tex-math notation="LaTeX">$\mu$</tex-math></inline-formula>W wearable sensing applications. The proposed multi-channel architecture supports 10 channels with a shared reconfigurable 6-bit differential analog-to-digital converter (ADC). The reconfigurable nature of the CDC enables adaptive sensing range and sensing speed based on the target application. Furthermore, the architecture performs both on/off-chip parasitic correction and baseline calibration to measure the change in capacitance (<inline-formula><tex-math notation="LaTeX">$\mathbf{\Delta C}$</tex-math></inline-formula>), excluding baseline and parasitic capacitances. The experimental results show the measurement range of <inline-formula><tex-math notation="LaTeX">$\mathbf{\Delta C}$</tex-math></inline-formula> are 5.34 pF for 1x sensitivity and 1.8 pF for 3x sensitivity respectively. The capacitive divider-based architecture excludes power-hungry operational trans-impedance amplifiers for capacitance to voltage conversion, and the architecture supports programmable channel access to activate or deactivate each channel independently. The random interrupt protection logic avoids any broken sample or data error in a sampling window. Additionally, the channel monitoring logic helps keep track of specific channel information. The measured silicon result shows a total power consumption of 1.2 <inline-formula><tex-math notation="LaTeX">$\mathbf{\mu}$</tex-math></inline-formula>W for 1.6 kHz sampling frequency when driven by a 32 kHz clock, which is 8.6x less than prior works. The CDC is also tested with DMMP (dimethyl-methylphosphonate) gas sensor in gas chromatography (GC). Implemented in 65 nm CMOS process, the 10-channel CDC occupies 0.251 <inline-formula><tex-math notation="LaTeX">$\mathbf{mm^{2}}$</tex-math></inline-formula> of active area (0.0251 <inline-formula><tex-math notation="LaTeX">$\mathbf{mm^{2}}$</tex-math></inline-formula>/Ch).