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Reliable post-production characterization approach to TiO2/SiO2electron-beam optical coatings based on multi-sample photometric and ellipsometric data

Authors :
Lequime, Michel
Ristau, Detlev
Amochkina, Tatiana
Trubetskov, Michael
Janicki, Vesna
Sancho-Parramon, Jordi
Source :
Proceedings of SPIE; June 2024, Vol. 13020 Issue: 1 p130200S-130200S-8, 1171809p
Publication Year :
2024

Details

Language :
English
ISSN :
0277786X
Volume :
13020
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs66982639
Full Text :
https://doi.org/10.1117/12.3017184