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Towards on-chip magnetometry for SiC power electronics using Si vacancies in 4H-SiC
- Source :
- Proceedings of SPIE; June 2024, Vol. 12993 Issue: 1 p129930Q-129930Q-6, 1169377p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12993
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66686251
- Full Text :
- https://doi.org/10.1117/12.3029599