Back to Search
Start Over
Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications
- Source :
- Proceedings of SPIE; April 2024, Vol. 12955 Issue: 1 p129551F-129551F-9, 1165969p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12955
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66214903
- Full Text :
- https://doi.org/10.1117/12.3011279