High-NA mask phase-effects studied by AIMS EUV

MLA

Burkhardt, Martin, et al. “High-NA Mask Phase-Effects Studied by AIMS EUV.” Proceedings of SPIE, vol. 12953, no. 1, Apr. 2024, p. 129531F–129531F–7. EBSCOhost, https://doi.org/10.1117/12.3010001.

APA

Burkhardt, M., van Lare, C., Roesch, M., Kersteen, G., Verch, A., Albert, M., Heringlake, P., Gwosch, K., & Capelli, R. (2024). High-NA mask phase-effects studied by AIMS EUV. Proceedings of SPIE, 12953(1), 129531F–129531F–7. https://doi.org/10.1117/12.3010001

Chicago

Burkhardt, Martin, Claire van Lare, Matthias Roesch, Grizelda Kersteen, Andreas Verch, Maximilian Albert, Philip Heringlake, Klaus Gwosch, and Renzo Capelli. 2024. “High-NA Mask Phase-Effects Studied by AIMS EUV.” Proceedings of SPIE 12953 (1): 129531F–129531F–7. doi:10.1117/12.3010001.