Back to Search
Start Over
Pushing the boundaries of random logic metal patterning with low-n EUV single exposure
- Source :
- Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530X-129530X-9, 1165780p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12953
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66172031
- Full Text :
- https://doi.org/10.1117/12.3010868