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Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Authors :
Zappe, Hans
Piyawattanametha, Wibool
Park, Yong-Hwa
Hwang, J.-Y.
Yarar, E.
Wysocki, L.
Röhr, F.
Wille, G.
Gu-Stoppel, S.
Source :
Proceedings of SPIE; March 2024, Vol. 12899 Issue: 1 p128990E-128990E-8, 1160919p
Publication Year :
2024

Details

Language :
English
ISSN :
0277786X
Volume :
12899
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs65990326
Full Text :
https://doi.org/10.1117/12.2692907