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Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors
- Source :
- Proceedings of SPIE; March 2024, Vol. 12899 Issue: 1 p128990E-128990E-8, 1160919p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12899
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs65990326
- Full Text :
- https://doi.org/10.1117/12.2692907