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Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society
- Source :
- Proceedings of SPIE; March 2024, Vol. 12885 Issue: 1 p128850Z-128850Z-6, 1159657p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12885
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs65959092
- Full Text :
- https://doi.org/10.1117/12.3021874