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Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials

Authors :
Kling, Rainer
Pfleging, Wilhelm
Sugioka, Koji
Lutz, C.
Sommerhuber, R.
Kettner, M.
Esen, C.
Hellmann, R.
Source :
Proceedings of SPIE; March 2024, Vol. 12873 Issue: 1 p128730U-128730U-6, 1158577p
Publication Year :
2024

Details

Language :
English
ISSN :
0277786X
Volume :
12873
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs65947965
Full Text :
https://doi.org/10.1117/12.3000954