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Influence of absorption distribution in Mo/Si multilayers on 13.5 nm femtosecond laser damage morphologies
- Source :
- Proceedings of SPIE; December 2023, Vol. 12982 Issue: 1 p129820U-129820U-5, 1168386p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12982
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs65030911
- Full Text :
- https://doi.org/10.1117/12.3018263