Dynamic Compensation Strategy for Scanning Error of Contact Probe Based on Damping Ratio and Frequency Mapping

High precision and efficiency are the main advantages of contact scanning probes. However, the measurement result distortion caused by high-speed and high-frequency scanning has become increasingly prominent. Therefore, this article proposes a two-stage dynamic compensation strategy based on damping ratio and frequency mapping, which utilizes the compensation effect of different damping ratios to enhance compensation in series after the primary compensation. The time-domain response function of the probe system is constructed, revealing its characteristics and error distribution in transient and steady state responses. Then, the mapping spectrum of the damping ratio and compensation error at multiple discrete frequencies is studied, and a dynamic compensator based on the zero-pole cancellation principle is designed. Furthermore, a dynamic solution framework based on Kalman filtering is proposed, achieving targeted, and accurate compensation of the target frequency, especially for medium to high-frequency signals. Finally, compensation simulations and experiments for low-to-high frequency mixed signals are designed, verifying the significant effect of the proposed method through compensation precision comparison.