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Identifying new absorber materials for EUV photomasks

Authors :
Liang, Ted
Kim, Seong-Sue
Stern, Rebecca D.
Grimbergen, Michael
Chen, Jeff
Yalamanchili, Rao
Source :
Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p1275118-1275118-9
Publication Year :
2023

Details

Language :
English
ISSN :
0277786X
Volume :
12751
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs64769138
Full Text :
https://doi.org/10.1117/12.2686935