Back to Search
Start Over
Research on TSOM detection method for subsurface defects of optical components
- Source :
- Proceedings of SPIE; November 2023, Vol. 12935 Issue: 1 p129354K-129354K-7, 1164194p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12935
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs64733982
- Full Text :
- https://doi.org/10.1117/12.3008043