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Variable-angle, spectroscopic ellipsometry study on the repeated application of first contact polymer on silicon-based surfaces
- Source :
- Proceedings of SPIE; October 2023, Vol. 12666 Issue: 1 p1266609-1266609-15
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12666
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs64370035
- Full Text :
- https://doi.org/10.1117/12.2692390