Photoresist thickness measurement

MLA

Quinn, Robert. “Photoresist Thickness Measurement.” Proceedings of SPIE, vol. 12806, no. 1, Oct. 2023, p. 128060C–128060C–12. EBSCOhost, https://doi.org/10.1117/12.3011309.

APA

Quinn, R. (2023). Photoresist thickness measurement. Proceedings of SPIE, 12806(1), 128060C–128060C–12. https://doi.org/10.1117/12.3011309

Chicago

Quinn, Robert. 2023. “Photoresist Thickness Measurement.” Proceedings of SPIE 12806 (1): 128060C–128060C–12. doi:10.1117/12.3011309.