Cite
SEMI-CenterNet: a machine learning facilitated approach for semiconductor defect inspection
MLA
Behringer, Uwe F., et al. “SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection.” Proceedings of SPIE, vol. 12802, no. 1, Oct. 2023, p. 128020M–128020M–9. EBSCOhost, https://doi.org/10.1117/12.2675570.
APA
Behringer, U. F., Loeschner, H., Finders, J., De Ridder, V., Dey, B., Dehaerne, E., Halder, S., De Gendt, S., & Van Waeyenberge, B. (2023). SEMI-CenterNet: a machine learning facilitated approach for semiconductor defect inspection. Proceedings of SPIE, 12802(1), 128020M–128020M–9. https://doi.org/10.1117/12.2675570
Chicago
Behringer, Uwe F., Hans Loeschner, Jo Finders, Vic De Ridder, Bappaditya Dey, Enrique Dehaerne, Sandip Halder, Stefan De Gendt, and Bartel Van Waeyenberge. 2023. “SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection.” Proceedings of SPIE 12802 (1): 128020M–128020M–9. doi:10.1117/12.2675570.