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Comparison of approximate methods for modelling coherence scanning interferometry
- Source :
- Proceedings of SPIE; August 2023, Vol. 12619 Issue: 1 p126190R-126190R-14, 12492825p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12619
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs63842890
- Full Text :
- https://doi.org/10.1117/12.2673657