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An optical critical dimension (OCD) model analysis on 3nm complementary FET (CFET) gate stacks
- Source :
- Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124962Q-124962Q-4, 1124663p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12496
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs63133508
- Full Text :
- https://doi.org/10.1117/12.2657944