A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2Atomic Layer Deposition

MLA

Kaneda, Yukio, et al. “A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2Atomic Layer Deposition.” The Journal of Physical Chemistry - Part C, vol. 127, no. 21, June 2023, pp. 10303–14. EBSCOhost, https://doi.org/10.1021/acs.jpcc.3c00965.

APA

Kaneda, Y., Nye, R. A., Marques, E. A., Armini, S., Delabie, A., van Setten, M. J., & Pourtois, G. (2023). A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2Atomic Layer Deposition. The Journal of Physical Chemistry - Part C, 127(21), 10303–10314. https://doi.org/10.1021/acs.jpcc.3c00965

Chicago

Kaneda, Yukio, Rachel A. Nye, Esteban A. Marques, Silvia Armini, Annelies Delabie, Michiel J. van Setten, and Geoffrey Pourtois. 2023. “A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2Atomic Layer Deposition.” The Journal of Physical Chemistry - Part C 127 (21): 10303–14. doi:10.1021/acs.jpcc.3c00965.