Back to Search
Start Over
Low-power contactless button system based on MEMS ScAlN pyroelectric detector
- Source :
- Proceedings of SPIE; March 2023, Vol. 12434 Issue: 1 p1243405-1243405-6
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12434
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs62891132
- Full Text :
- https://doi.org/10.1117/12.2648806