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Simulation and fabrication of electromagnetic shielding metallic mesh microstructure based on germanium substrate

Authors :
Zhou, Pu
Yang, Yonghua
Xie, Qiming
Ru, Qiuxu
Chen, Ji
Zhu, Xufeng
Jiao, Songfeng
Cheng, Haijuan
Source :
Proceedings of SPIE; March 2023, Vol. 12595 Issue: 1 p125951P-125951P-7, 1133567p
Publication Year :
2023

Details

Language :
English
ISSN :
0277786X
Volume :
12595
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs62809889
Full Text :
https://doi.org/10.1117/12.2668794