Method to detect carbon in silicon crystals in the concentration range down to 5 × 1014cm−3by Fourier transform infrared absorption at room temperature

MLA

Tajima, Michio, et al. “Method to Detect Carbon in Silicon Crystals in the Concentration Range down to 5 × 1014cm−3by Fourier Transform Infrared Absorption at Room Temperature.” Japanese Journal of Applied Physics, vol. 61, no. 9, Sept. 2022, p. 096502. EBSCOhost, https://doi.org/10.35848/1347-4065/ac808d.

APA

Tajima, M., Fujimori, H., Takeda, R., Kawai, N. J., & Ishihara, N. (2022). Method to detect carbon in silicon crystals in the concentration range down to 5 × 1014cm−3by Fourier transform infrared absorption at room temperature. Japanese Journal of Applied Physics, 61(9), 096502. https://doi.org/10.35848/1347-4065/ac808d

Chicago

Tajima, Michio, Hiroyuki Fujimori, Ryuji Takeda, Naoyuki J. Kawai, and Noriyuki Ishihara. 2022. “Method to Detect Carbon in Silicon Crystals in the Concentration Range down to 5 × 1014cm−3by Fourier Transform Infrared Absorption at Room Temperature.” Japanese Journal of Applied Physics 61 (9): 096502. doi:10.35848/1347-4065/ac808d.