WCVD Seam Hole Improvement to Prevent BEOL Copper Diffusion

MLA

Li, Xia, et al. “WCVD Seam Hole Improvement to Prevent BEOL Copper Diffusion.” ECS Transactions, vol. 27, no. 1, Nov. 2010. EBSCOhost, https://doi.org/10.1149/1.3360645.

APA

Li, X., Ji, J., Ou-Yang, D., Jiang, R., Zhang, J., Chiu, R., Lin, P.-C., & Xing, C. (2010). WCVD Seam Hole Improvement to Prevent BEOL Copper Diffusion. ECS Transactions, 27(1). https://doi.org/10.1149/1.3360645

Chicago

Li, Xia, Justin Ji, Dong Ou-Yang, Ronnie Jiang, Jiwei Zhang, Robin Chiu, Paul-Chang Lin, and Charles Xing. 2010. “WCVD Seam Hole Improvement to Prevent BEOL Copper Diffusion.” ECS Transactions 27 (1). doi:10.1149/1.3360645.