Mask process correction for laser writers

MLA

Kasprowicz, Bryan S., et al. “Mask Process Correction for Laser Writers.” Proceedings of SPIE, vol. 12293, no. 1, Dec. 2022, p. 122930J–122930J–7. EBSCOhost, https://doi.org/10.1117/12.2641990.

APA

Kasprowicz, B. S., Liang, T., Bork, I., Mishra, K., Mukherjee, S., Sharma, R., & Zuo, M. (2022). Mask process correction for laser writers. Proceedings of SPIE, 12293(1), 122930J–122930J–7. https://doi.org/10.1117/12.2641990

Chicago

Kasprowicz, Bryan S., Ted Liang, Ingo Bork, Kushlendra Mishra, Samarpita Mukherjee, Rachit Sharma, and Mary Zuo. 2022. “Mask Process Correction for Laser Writers.” Proceedings of SPIE 12293 (1): 122930J–122930J–7. doi:10.1117/12.2641990.