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Study on femtosecond laser processing of special-shaped hole in silicon carbide ceramic
- Source :
- Proceedings of SPIE; November 2022, Vol. 12351 Issue: 1 p123510Z-123510Z-5, 1111596p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12351
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs61124940
- Full Text :
- https://doi.org/10.1117/12.2651916