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Oxygen mediated optical and electrical property modification of RF sputtered Ga2O3thin films for photodetector application
- Source :
- Proceedings of SPIE; October 2022, Vol. 12202 Issue: 1 p1220204-1220204-7
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12202
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs61123921
- Full Text :
- https://doi.org/10.1117/12.2633278