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Surface evaluation of high-precision monolithic mirror for soft x-ray focusing
- Source :
- Proceedings of SPIE; October 2022, Vol. 12240 Issue: 1 p122400G-122400G-5, 1101606p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12240
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs61031162
- Full Text :
- https://doi.org/10.1117/12.2633765