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Machine learning based error classification for curvilinear designs

Authors :
Kim, Ryoung-Han
Lafferty, Neal V.
Yin, Lianghong
Shang, Shumay
Jiang, Fan
Hong, Le
Chia, Robin
Opitz, Juli
Adam, Paul
Stobert, Ian
Koh, Yee-Wee
Source :
Proceedings of SPIE; May 2022, Vol. 12052 Issue: 1 p120520A-120520A-12, 11931493p
Publication Year :
2022

Details

Language :
English
ISSN :
0277786X
Volume :
12052
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs60338040
Full Text :
https://doi.org/10.1117/12.2613933