Back to Search
Start Over
Study on the surface flattening of borosilicate glass in chemical mechanical polishing
- Source :
- Proceedings of SPIE; April 2022, Vol. 12244 Issue: 1 p1224407-1224407-6
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12244
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs59792692
- Full Text :
- https://doi.org/10.1117/12.2635202