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Foundry compatible fabrication of Si3N4microring resonators for 15-plex biosensing at 1310nm
- Source :
- Proceedings of SPIE; March 2022, Vol. 12006 Issue: 1 p120060F-120060F-8, 1080549p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12006
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs59693754
- Full Text :
- https://doi.org/10.1117/12.2626392