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Design of a high-precision two-dimensional coplanar micro-vibration generator

Design of a high-precision two-dimensional coplanar micro-vibration generator

Authors :
Xia, Haojie
Yang, Lian X.
Yu, Liandong
Zhang, Lian-sheng
Bian, Ke-Wei
Lei, Ying-jun
Li, Rui-Jun
Fan, Kuang-Chao
Source :
Proceedings of SPIE; November 2021, Vol. 12059 Issue: 1 p120591L-120591L-6, 1085326p
Publication Year :
2021

Details

Language :
English
ISSN :
0277786X
Volume :
12059
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs58517715
Full Text :
https://doi.org/10.1117/12.2612275