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Dual DoFP polarimeters based collinear reflection Mueller matrix microscope for fast process monitoring
- Source :
- Proceedings of SPIE; November 2021, Vol. 11900 Issue: 1 p1190004-1190004-8
- Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11900
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs58512189
- Full Text :
- https://doi.org/10.1117/12.2600936