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High-thermal-stability resistor formed from manganese nitride compound that exhibits the saturation state of the mean free path
- Source :
- Applied Physics Express (APEX); September 2021, Vol. 14 Issue: 9 p091003-091003, 1p
- Publication Year :
- 2021
-
Abstract
- Antiperovskite manganese nitride compounds possess the saturation characteristics of the mean free path at an approximate room temperature. Therefore, such compounds show a flat resistance-temperature curve at an approximate room temperature. In this paper, we propose a manganese nitride resistor for high-thermal-stability systems. We fabricated and evaluated the micro/nanoscale manganese nitride compound resistors using the complementary metal-oxide-semiconductor-compatible process. The thermal coefficient of the fabricated manganese nitride compound resistor was as low as that of other near-zero temperature-coefficient of resistivity materials. These results indicate that manganese nitride compounds can achieve higher thermal stability.
Details
- Language :
- English
- ISSN :
- 18820778 and 18820786
- Volume :
- 14
- Issue :
- 9
- Database :
- Supplemental Index
- Journal :
- Applied Physics Express (APEX)
- Publication Type :
- Periodical
- Accession number :
- ejs57587115
- Full Text :
- https://doi.org/10.35848/1882-0786/ac18b0