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Electrical and physical failure analysis techniques for oxide aperture delineation in high-power oxide-confined VCSEL arrays
- Source :
- Proceedings of SPIE; May 2021, Vol. 11777 Issue: 1 p117770S-117770S-7, 1059938p
- Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11777
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs56855001
- Full Text :
- https://doi.org/10.1117/12.2589056