Controlled ALD doping of Er3+for active on-chip waveguide amplifiers based on Al2O3

MLA

García-Blanco, Sonia M., et al. “Controlled ALD Doping of Er3+for Active On-Chip Waveguide Amplifiers Based on Al2O3.” Proceedings of SPIE, vol. 11689, no. 1, Mar. 2021, p. 116890S–116890S–9. EBSCOhost, https://doi.org/10.1117/12.2586874.

APA

García-Blanco, S. M., Cheben, P., Demirtaş, M., Kosku Perkgöz, N., & Ay, F. (2021). Controlled ALD doping of Er3+for active on-chip waveguide amplifiers based on Al2O3. Proceedings of SPIE, 11689(1), 116890S–116890S–9. https://doi.org/10.1117/12.2586874

Chicago

García-Blanco, Sonia M., Pavel Cheben, Mustafa Demirtaş, Nihan Kosku Perkgöz, and Feridun Ay. 2021. “Controlled ALD Doping of Er3+for Active On-Chip Waveguide Amplifiers Based on Al2O3.” Proceedings of SPIE 11689 (1): 116890S–116890S–9. doi:10.1117/12.2586874.