Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources

MLA

Antonova, Tatjana, et al. “Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources.” Japanese Journal of Applied Physics, vol. 37, no. 12, Dec. 1998, p. 6906. EBSCOhost, https://doi.org/10.1143/JJAP.37.6906.

APA

Antonova, T., Bougrov, G., Bougrova, A., Choi, W.-K., Goncharov, L., Jung, H.-J., Koh, S.-K., Kondranin, S., Kralkina, E., Sitin, E., & Obukhov, V. (1998). Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources. Japanese Journal of Applied Physics, 37(12), 6906. https://doi.org/10.1143/JJAP.37.6906

Chicago

Antonova, Tatjana, Gleb Bougrov, Antonina Bougrova, Won-Kook Choi, Leonid Goncharov, Hyung-Jin Jung, Seoh-Keun Koh, et al. 1998. “Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources.” Japanese Journal of Applied Physics 37 (12): 6906. doi:10.1143/JJAP.37.6906.