Back to Search
Start Over
High-Energy Ion Beam Analysis of YBa2Cu3OxThin Films
- Source :
- Japanese Journal of Applied Physics; January 1989, Vol. 28 Issue: 3 p346-346, 1p
- Publication Year :
- 1989
-
Abstract
- The composition and crystalline structure of high-Tcsuperconducting YBa2Cu3Oxthin films formed on MgO(100) and Si(100) substrates have been investigated by Rutherford backscattering and channeling techniques. Y, Ba, Cu contents have been analyzed by employing a high-energy (over 4.5 MeV) 4He ions and large scattering angle (near 170°) condition, where Y, Ba and Cu peaks are clearly separated from each other. Oxygen concentration has been obtained through the use of low primary energy (below 2.5 MeV) and small scattering angle (below 150°) conditions, where the O peak is separated from the background. The crystalline quality of the films has also been investigated by ion channeling techniques.
Details
- Language :
- English
- ISSN :
- 00214922 and 13474065
- Volume :
- 28
- Issue :
- 3
- Database :
- Supplemental Index
- Journal :
- Japanese Journal of Applied Physics
- Publication Type :
- Periodical
- Accession number :
- ejs56118584
- Full Text :
- https://doi.org/10.1143/JJAP.28.346