Stress Sensitivity Distribution Measurement Using a Low-Frequency Sound Wave and Its Application to Quartz Crystal Microbalances

A new method for measuring the stress sensitivity distribution on a resonator surface, including a region without electrodes, using a low-frequency sound wave is described. The experimental results for an AT-cut quartz crystal resonator obtained using the proposed method and the current pulsed-laser method are shown. Additionally, we applied this method to the design of quartz crystal microbalances using multiple resonance modes.